University Chemistry ›› 2017, Vol. 32 ›› Issue (8): 53-59.doi: 10.3866/PKU.DXHX201703030

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The Peak Separation Process in X-ray Photoelectron Spectroscopy

Bo-Wen SUN1,Hong-Yu YU1,Dong-Jin QIAN1,Meng CHEN2,*()   

  1. 1 Department of Chemistry, Fudan University, Shanghai 200433, P. R. China
    2 Department of Materials Science, Fudan University, Shanghai 200433, P. R. China
  • Published:2017-08-15
  • Contact: Meng CHEN
  • Supported by:


The normative process for peak separation in X-ray photoelectron spectroscopy was discussed in detail. The adjustment of binding energy shift, data smoothing, baseline correction, peak determination, and multi-Gaussian function fitting were carried out in mathematics. Besides, the principles in peak separation for p, d, and f atomic orbitals were also reviewed. Peaks with enough width at half maximum and intensities can be considered as peaks. The quantitative limit for the peak intensity should be 10 times of the statistical fluctuation of the background signal, and proper statistic tests such as chi-square test and paired t test should be used.

Key words: Background subtraction, Peak determination, Peak fitting, Statistic test


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