大学化学 >> 2026, Vol. 41 >> Issue (6): 196-203.doi: 10.12461/PKU.DXHX202511180

所属专题： 化学“101计划”案例

专题 上一篇    

像散位移显微镜的研制及教学设计——推荐一个化学测量学实验(微纳先进表征)

周丹1, 刘心月1, 郭子靖1, 杨建平1, 郭泽莹1, 任卓尔1, 俞娥2, 潘婷1, 任豆豆1, 曾智聪1   

  1. 1 兰州大学化学化工学院, 天然产物化学全国重点实验室, 甘肃 兰州 730000;
    2 化学国家级实验教学示范中心(兰州大学), 甘肃 兰州 730000
  • 收稿日期:2025-11-25 录用日期:2026-02-06 发布日期:2026-06-18
  • 通讯作者: 潘婷, 任豆豆, 曾智聪 E-mail:pant20@lzu.edu.cn;120220905140@lzu.edu.cn;zengzc@lzu.edu.cn Ting Pan, Doudou Ren, Zhicong Zeng
  • 基金资助:
    国家自然科学基金(22574070)；教育部化学“101 计划”——化学测量学实验课程建设项目；教育部第三批虚拟教研室建设试点——“101 计划”化学测量学实验课程虚拟教研室

Development and teaching design of astigmatic displacement microscopy: a recommended experiment for chemical metrology (micro-nano advanced characterization)

Dan Zhou1, Xinyue Liu1, Zijing Guo1, Jianping Yang1, Zeying Guo1, Zhuoer Ren1, E Yu2, Ting Pan1, Doudou Ren1, Zhicong Zeng1   

  1. 1 State Key Laboratory of Natural Product Chemistry, College of Chemistry and Chemical Engineering, Lanzhou University, Lanzhou 730000, Gansu Province, China;
    2 National Demonstration Center for Experimental Chemistry Education (Lanzhou University), Lanzhou 730000, Gansu Province
  • Received:2025-11-25 Accepted:2026-02-06 Published:2026-06-18
  • Contact: Ting Pan, Doudou Ren, Zhicong Zeng E-mail:pant20@lzu.edu.cn;120220905140@lzu.edu.cn;zengzc@lzu.edu.cn

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摘要： 在现有的本科实验教学中，微纳表征常采用扫描探针显微技术、扫描电镜显微技术，而对于光学非接触式测量技术则存在空白。像散位移显微镜是一种基于像散测量的新技术，其具备光学非接触、扫描范围大、成像速度快和轴向纳米级分辨率等优势。为了将其引入化学“101计划”——化学测量学实验，本文自主研发了一款专为教学实验定制的像散位移显微镜仪器，并基于该仪器设计了一套完整的实验教学方案。本实验涉及“化学-光学-电子学-微纳表征”领域，通过开展“位移信号标定-三维成像-振动分析-膜厚测量”这四部分内容，激发学生对微纳表征前沿动态的思考，了解高精尖表征技术对于先进制造的重要性，并在动手实践过程中增强科学仪器自主国产化的信心，培养仪器类人才。

关键词: 化学测量学实验, 像散位移显微镜, 微纳表征, 教学仪器, 仪器研制

Abstract: In current undergraduate laboratory curricula concerning micro-nano characterization, scanning probe microscopy and scanning electron microscopy are predominantly employed, while non-contact optical measurement techniques remain underrepresented. Astigmatic displacement microscopy (ADM) represents an innovative technique based on astigmatism measurement, offering distinct advantages including non-contact operation, extensive scanning range, rapid imaging speed, and axial nanometer-scale resolution. To incorporate this advanced technology into the “101 Plan” chemical metrology experiments, we have independently developed a customized ADM instrument specifically designed for instructional purposes and established a comprehensive experimental teaching protocol. This experiment integrates interdisciplinary knowledge from chemistry, optics, electronics, and micro-nano characterization. Through four modular components—displacement signal calibration, three-dimensional imaging, vibration analysis, and film thickness measurement—the curriculum aims to stimulate students’ critical thinking regarding cutting-edge developments in micro-nano characterization, enhance their understanding of the significance of high-precision characterization technologies in advanced manufacturing, and foster confidence in domestic instrument innovation through hands-on practice, thereby cultivating specialized talent in instrumentation.

Key words: Chemical metrology experiments, Astigmatic displacement microscopy, Micro-nano characterization, Teaching instrument, Instrument development