面向光刻技术教学创新的本科综合实验设计——纳米晶的直接光刻图案化

doi:10.12461/PKU.DXHX202604074

大学化学

面向光刻技术教学创新的本科综合实验设计——纳米晶的直接光刻图案化

郭玥¹, 胡孟熙¹, 孔新珂¹, 管杰¹, 王诗羽², 宋荣斌², 张盼科¹, 王元元¹

1 配位化学全国重点实验室, 南京大学化学学院, 江苏南京 210023;
2 郑州大学生态与环境学院, 郑州河南 450001

收稿日期:2026-04-16 录用日期:2026-04-24
通讯作者: 宋荣斌, 张盼科, 王元元 E-mail:rbsong@zzu.edu.cn;pkzhang@nju.edu.cn;wangyy@nju.edu.cn Rongbin Song, Panke Zhang, Yuanyuan Wang
基金资助:
江苏省科技计划项目(BK20232041);中国国家自然科学基金(52472165)

An undergraduate comprehensive experiment for teaching innovation in lithography: direct photopatterning of nanocrystals

Yue Guo¹, Mengxi Hu¹, Xinke Kong¹, Jie Guan¹, Shiyu Wang², Rongbin Song², Panke Zhang¹, Yuanyuan Wang¹

1 State Key Laboratory of Coordination Chemistry, School of Chemistry, Nanjing University, Nanjing 210023, Jiangsu Province, China;
2 College of Ecology and Environment, Zhengzhou University, Zhengzhou 450001, Henan Province, China

Received:2026-04-16 Accepted:2026-04-24
Contact: Rongbin Song, Panke Zhang, Yuanyuan Wang E-mail:rbsong@zzu.edu.cn;pkzhang@nju.edu.cn;wangyy@nju.edu.cn

摘要/Abstract

摘要： 光刻是微纳制造核心工艺，但本科化学实验中相关训练不足。本文以纳米晶直接光刻图案化为切入点，设计面向高年级本科生的研究型综合实验，将配体交换、光学调控、图案构筑与形貌表征有机融合，构建“配体结构-表面状态-光学响应-图案结构”的多尺度关联。教学实践表明，该实验在保障规范与安全的前提下，有效引入光刻核心思想，显著提升课程的前沿性、工程关联度与探究深度，促进学生科研思维与问题意识的形成，为光刻技术融入本科实验教学提供了可推广路径。

关键词: 光刻, 微纳制造, 纳米晶, 配体设计, 研究型实验教学

Abstract: Photolithography is a core technology in micro- and nanofabrication, yet its systematic training is limited in undergraduate chemistry laboratories. Here, we develop a research-oriented comprehensive experiment based on the direct photopatterning of nanocrystals for senior undergraduates. By integrating ligand exchange, optical modulation, pattern fabrication, and structural characterization, the experiment establishes a multiscale correlation among ligand structure, surface state, optical response, and patterned structures. Teaching practice demonstrates that this module effectively introduces key photolithographic concepts while maintaining operational safety and rigor. It significantly enhances the frontier relevance, engineering connection, and inquiry depth of the course, and promotes the development of students’ scientific thinking and problem awareness. This work provides a practical and transferable framework for incorporating photolithography into undergraduate laboratory education.

Key words: Photolithography, Micro/Nanofabrication, Nanocrystal, Ligand engineering, Research-oriented laboratory teaching

郭玥, 胡孟熙, 孔新珂, 管杰, 王诗羽, 宋荣斌, 张盼科, 王元元. 面向光刻技术教学创新的本科综合实验设计——纳米晶的直接光刻图案化[J]. 大学化学, 2026, (): 2604074.

Yue Guo, Mengxi Hu, Xinke Kong, Jie Guan, Shiyu Wang, Rongbin Song, Panke Zhang, Yuanyuan Wang. An undergraduate comprehensive experiment for teaching innovation in lithography: direct photopatterning of nanocrystals[J]. University Chemistry, 2026, (): 2604074.

链接本文: https://www.dxhx.pku.edu.cn/CN/10.12461/PKU.DXHX202604074

https://www.dxhx.pku.edu.cn/CN/Y2026/V/I/2604074

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