大学化学 >> 2026, Vol. 41 >> Issue (1): 114-121.doi: 10.12461/PKU.DXHX202505104

所属专题： 化学实验数字化设计竞赛获奖作品

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基于半实物的场发射扫描电镜数字化实验设计

何攀, 严军林, 陈志刚, 代恩鸣, 赵鑫, 王蕊娟   

  1. 陕西师范大学化学化工学院, 西安 710119
  • 收稿日期:2025-05-30 录用日期:2025-09-16 发布日期:2025-12-30
  • 通讯作者: 严军林 E-mail:jlyan@snnu.edu.cn Junlin Yan
  • 基金资助:
    陕西师范大学实验室技术研究项目(SYJS202403, SYJS202422, SYJS202505)

Design of Digital Experiment for Field Emission Scanning Electron Microscopy Based on Semi-Physical Simulation

Pan He, Junlin Yan, Zhigang Chen, Enming Dai, Xin Zhao, Ruijuan Wang   

  1. School of Chemistry and Chemical Engineering, Shaanxi Normal University, Xi'an 710119, China
  • Received:2025-05-30 Accepted:2025-09-16 Published:2025-12-30
  • Contact: Junlin Yan E-mail:jlyan@snnu.edu.cn

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摘要： 针对场发射扫描电镜实验教学难以有效开展的问题，在操作流程全过程模拟的基础上，设计算法实时模拟像散、聚焦、亮度等参数调节所引起的图像变化，并通过仿真控制台实现交互操作，提升学生电镜参数调节及图像获取方面的能力。方案对实验内容及操作方式两方面进行高保真模拟，为透射电镜等同类仪器实验教学提供了新的思路。

关键词: 半实物仿真, 数字化实验, 扫描电镜, 实验教学

Abstract: To overcome the challenges in effectively implementing experimental teaching of field emission scanning electron microscopy (FE-SEM), this study developed an algorithm that simulates real-time image variations resulting from parameter adjustments including astigmatism, focus, and brightness, while replicating the complete operational procedure. An interactive simulation console is developed to enable interactive operations, aiming to enhance students’ capabilities in parameter adjustment and image acquisition for FE-SEM. The proposed scheme achieves high-fidelity simulation in both experimental content and operational methods, with potential applications in teaching transmission electron microscopy and similar instrumentation courses.

Key words: Semi-physical simulation, Digital experiment, Scanning electron microscopy (SEM), Experimental Teaching