Abstract: In current undergraduate laboratory curricula concerning micro-nano characterization, scanning probe microscopy and scanning electron microscopy are predominantly employed, while non-contact optical measurement techniques remain underrepresented. Astigmatic displacement microscopy (ADM) represents an innovative technique based on astigmatism measurement, offering distinct advantages including non-contact operation, extensive scanning range, rapid imaging speed, and axial nanometer-scale resolution. To incorporate this advanced technology into the “101 Plan” chemical metrology experiments, we have independently developed a customized ADM instrument specifically designed for instructional purposes and established a comprehensive experimental teaching protocol. This experiment integrates interdisciplinary knowledge from chemistry, optics, electronics, and micro-nano characterization. Through four modular components—displacement signal calibration, three-dimensional imaging, vibration analysis, and film thickness measurement—the curriculum aims to stimulate students’ critical thinking regarding cutting-edge developments in micro-nano characterization, enhance their understanding of the significance of high-precision characterization technologies in advanced manufacturing, and foster confidence in domestic instrument innovation through hands-on practice, thereby cultivating specialized talent in instrumentation.

Key words: Chemical metrology experiments, Astigmatic displacement microscopy, Micro-nano characterization, Teaching instrument, Instrument development