Abstract: To overcome the challenges in effectively implementing experimental teaching of field emission scanning electron microscopy (FE-SEM), this study developed an algorithm that simulates real-time image variations resulting from parameter adjustments including astigmatism, focus, and brightness, while replicating the complete operational procedure. An interactive simulation console is developed to enable interactive operations, aiming to enhance students’ capabilities in parameter adjustment and image acquisition for FE-SEM. The proposed scheme achieves high-fidelity simulation in both experimental content and operational methods, with potential applications in teaching transmission electron microscopy and similar instrumentation courses.

Key words: Semi-physical simulation, Digital experiment, Scanning electron microscopy (SEM), Experimental Teaching