University Chemistry ›› 2015, Vol. 30 ›› Issue (3): 51-55.doi: 10.3866/pku.DXHX2010351

• Chemistry Laboratory • Previous Articles     Next Articles

Characterization of α-Fe2O3 Film Prepared by MOCVD Method

Liu Bin, Yang Jianhui   

  1. Key Laboratory of Synthetic and Natural Functional Molecule Chemistry of Ministry of Education, College of Chemistry & Materials Science, Northwest University, Xi'an 710069, Shaanxi, China
  • Published:2015-06-25

Abstract:

Using Fe(acac)3 (acac=acetylacetone) as the solid source, α-Fe2O3 thin film was prepared by metal organic chemistry vapour deposition (MOCVD) method with ultrasonic nebulization device. The structural, electrical and optical properties of the film were characterized.

Key words: Ultrasonic nebulization, α-Fe2O3 thin film, Chemical vapor deposition